What is a factory energy management system?
A comprehensive energy management system that supports factory energy management through real-time monitoring, analysis, forecast, and control functions.
What is energy consumption in a fab?
Energy consumption in a fab is divided into several parts, including the HVAC system, the exhaust system, PCW, UPW, CDA, nitrogen, vacuum, fans, pumps, process tools, and lighting system. These facilities and materials are considered in the FES described in Ref. .
How much energy does a fab save?
When the outlet air temperature was 14 °C (approach B-6), the energy savings reached a maximum value of 3532 MW h, corresponding to approximately 29.1% of the original data, and it constituted an energy savings of 2.09% of the overall energy consumption in the fab.
Which process equipment consumes the most energy in a fab?
In addition to the process equipment, the highest energy consumers in the fab were the CDA (22.1%), water chiller (13.4% + 7.2% = 20.6%), PCW (5.8%), de-ionized water (DIW) (3.2%), and exhaust systems (2.0%). Table 2. The information of the MAU system for the studied fab.
What is energy management system?
As a management system for optimizing energy performance used in production facilities, it provides an ICT-based energy saving solution that promotes efficient use of energy by monitoring, analyzing, and remotely controlling the energy used in production and maintenance of facilities. Utilization of proven energy management system solutions
How much energy is saved by approach D-3 fabs in Taiwan?
However, overall energy savings of approach D-3 was only 0.32%. Taiwan maintains the largest share of semiconductor wafer fab capacity in the world since 2016, as 21.3% of worldwide in 2016 . Therefore, a validation by a fab data in Taiwan has symbolic value.
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